SMC Chemical Liquid Valves & Equipments

Product Details:

• Enclosure: JISF8007 IP65 (IEC 60529)
• Monitoring function
• Explosion proof structure
• Electro-pneumatic positioner: TIIS withstand pressure explosion proof construction (Exd@BT5)
• ATEX intrinsically safe explosion proof structure (@2G Ex i@CT5/T6)
• Smart positioner: ATEX intrinsically safe explosion proof structure (@1G Ex ia@CT4/T5/T6)
• HART communication function (Smart positioner)

Product Details:

• Body material: New PFA/Stainless steel/PPS
• Diaphragm material: PTFE, EPR, NBR can be selected.
• Manifold type No.: LLA2, LLA3, LLA4, LLA5

Product Details:

• Body: Stainless steel, Actuator section: ADC, Buffer: FKM/EPDM (selectable)
• Electro polishing can be specified. (Made to Order)
• Type of fitting: Double ferrule fittings, Metal gasket seal fittings, Integral tubing
• Export Trade Control Order
• Not applicable for list control

Product Details:

• Lineup of compact and space-saving types
• Up to 29% reduction in dimensions on piping side
• Body material: New PFA
• Diaphragm material: PTFE
• Actuator material: PPS
• Tubing O.D. for tube extension type.

Product Details:

• Screwless construction.
• Non-metallic construction without using metal screws to fasten the body of the actuator.
• Body: New PFA
• Diaphragm: PTFE
• Actuator: PVDF
• Space saving/Space saving connection (LVQS, LVQHS)
• Back pressure (0.5 MPa) tolerant (LVQH)

Product Details:

• Applicable to rigid vinyl chloride tube: Union type with PVC unfixed union
• Body material: CPVC, Diaphragm material: PTFE
• O-ring material: FKM, EPDM (selectable)
• Applicable fluids: Deionized water, Chemical liquids

Product Details:

• Complies to JIS standard for polyvinyl chloride piping (JIS K 6742).
• Applicable fluids: Deionized water, Chemical liquids
• Fluid contact materials: PVC (Body), PTFE (Poppet), FKM (O-ring: Standard) ,EPDM (O-ring: Option)
• Flow-rate characteristics: Cv factor 10 to 198
• Easy piping with union connection

Product Details:

• For UHP gas delivery in semiconductor and other clean industries.
• Body material: 316L SS secondary remelt or 316L SS
• Electropolished wetted parts
• Metal seal to atmosphere

Product Details:

• Cleanroom assembled and He leaked tested.
• Valve meets dimensional requirements of SEMI F36-0299, Option !
• User-friendly forged body

Product Details:

• For UHP gas delivery in semiconductor and other clean industries.
• Used as gas shutoff valve.
• No spring is used for the wetted parts and drive part is also separated from the diaphragm.
• Dead space in the flow path is small to suppress the particle generation.

Product Details:

• Low particle generation due to the diaphragm structure Flammable fluids can be used. (Air operated)
• Self-priming makes priming unnecessary. Sucks the liquid even if the pump is dry.
• Assembled in a clean room. Double packaged (PB1313A) 
• Easy to adjust the flow rate by the frequency of ON/OFF of the solenoid valve.

Product Details:

• For wide variety of applications from semiconductor to general.
• Body material 316 SS or brass available depending on gas.